3M Betapure Filter Cartridges
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Betapure AUBetapure™ AU series filter cartridges set the standard for filtration performance. The controlled pore size of the filter matrix allows for absolute distinction between cartridge grades to provide accurate and consistent filtration.
Provides precise contaminant reduction, consistent effluent quality, and superior on-stream service life. Betapure AU series filter manufacturing combines advanced incoming material quality assurance, exacting in-process controls, and extensive final product testing and verification. The result is a filter product designed to provide consistent filtration lot-to-lot, filter-to-filter. 
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Betapure AULBetapure AUL Series filters represent a new generation in Chemical Mechanical Planarization slurry classification providing superior reduction of large particle counts for improved yields. 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count reduction and yield improvement in the most advanced CMP processes.
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Betapure CMPBetapure CMP series filter capsules are high capacity depth filters optimized for oxide and metal slurries used in chemical mechanical planarization applications. Composed of all polypropylene components and feature a multi-zone “graded porosity” design for the optimum level of particle classification.
This novel construction provides enhanced flow characteristics, including low pressure drop, to minimize shearing of the slurry while providing superior service life.
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Betapure NT-PEnhanced flow. Lower pressure drop. Extended service life and lower total filtration costs…these are the benefits of Betapure™ NT-P Series filter cartridges, the latest advance in depth filtration technology. The all polypropylene filter is constructed using a process that utilizes flow enhancing filter media and an innovative flow pattern.
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Betapure NT-TBetapure NT-T Series cartridge was designed to provide significantly superior service life while maintaining a consistent filtration efficiency. Betapure NT-T Series filters achieve this through an innovative cartridge design that allows uniform distribution of fluid flow and contaminant throughout the entire depth of the cartridge.
Betapure NT-T Series filter construction combines a polypropylene media with fluid distribution netting to form multiple layers. Critically positioned media flow channels allow greater movement of fluid from layer to layer. Three distinct media sections, made from multiple media/netting layers, are combined to form the filter cartridge.
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